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Dr. Lothar PFITZNER Leiter, Abteilung Halbleiterfertigungsgeräte und -methoden, Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB, Erlangen

CV

M.S. (Dipl.-Ing.) degree in Materials Science and a Ph.D. (Dr.-Ing.) in Electronics Engineering, University of Erlangen-Nuremberg. Medicine, finished the second state examination 1976-1985 Assistant lecturer, Erlangen Engineering Faculty since 1985 Heading 'Semiconductor Manufacturing Equipment & Manufacturing Methods', Fraunhofer Institute of Integrated Systems and Device Technology (IISB), Erlangen since 1988 Lecturer on 'Semiconductor Manufacturing Techniques', Mechanical Engineering and Electrical Engineering, University of Erlangen-Nuremberg 1998-1999 Creation of spin-off company isiltec GmbH 1999-2003 CEO from isiltec GmbH, a world leading Technology Company since 2002 Leader of the "Yield Enhancement" ITWG (International Technical Working Group) and ITRS, the "International Technology Roadmap for Semiconductors" 2003 Professor for Micro electronics

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